Suppose you have the following

DiagonalMatrix[{0, 0, 0, 0, 0}]

={{0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}}

I want to replace one 0 with one 1 in order nxn as n goes from 1 to 5 in this case.so that you would get 5 separate arrays.

={{1, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}}

then

={{0, 0, 0, 0, 0}, {0,1, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}}

then

={{0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 1, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}}

And so on. The following should work, but obviously doesn't...

Table[DiagonalMatrix[{0, 0, 0, 0, 0}][[i, i]] /. {0 -> 1}, {i, 1, 5}]

I also need to choose, in a larger array, 3 0s at a time and replace with 1s. But all such array combination must be created.

For above example,

{{1, 0, 0, 0, 0}, {0, 1, 0, 0, 0}, {0, 0, 1, 0, 0}, {0, 0, 0, 0, 0}, {0, 0, 0, 0, 0}}

can be the first combination. Then

{{0, 0, 0, 0, 0}, {0, 1, 0, 0, 0}, {0, 0, 1, 0, 0}, {0, 0, 0, 1, 0}, {0, 0, 0, 0, 0}}

and so on.

being the second. But there are far more combination possible.. I need to find all possibles.

Any help is greatly appreciated.